Compact Plasma and Focused Ion Beams by Sudeep Bhattacharjee

By Sudeep Bhattacharjee

Recent study has introduced the applying of microwaves from the classical fields of heating, conversation, and new release of plasma discharges into the iteration of compact plasmas that may be used for purposes equivalent to FIB and small plasma thrusters. notwithstanding, those new purposes convey with them a brand new set of demanding situations. With assurance starting from the fundamentals to new and rising functions, Compact Plasma and concentrated Ion Beams discusses how compact high-density microwave plasmas with dimensions smaller than the geometrical cutoff measurement might be generated and applied for delivering targeted ion beams of varied components.

Starting with the basics of the cutoff challenge for wave propagation in waveguides and plasma diagnostics, the writer is going directly to clarify intimately the plasma construction by means of microwaves in a compact geometry and slender tubes. He then completely discusses wave interplay with bounded plasmas and offers a deeper realizing of the physics. The e-book concludes with an updated account of modern examine on pulsed microwaves and the appliance of compact microwave plasmas for multi-element FIB.

It presents a consolidated and unified description of the rising parts in plasma technology and expertise using wave-based plasma assets in line with the author’s personal paintings and event. The publication should be worthwhile not just to validated researchers during this zone yet also will function an outstanding creation to these drawn to utilising those rules to numerous present and new applications.

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By Sudeep Bhattacharjee

Recent study has introduced the applying of microwaves from the classical fields of heating, conversation, and new release of plasma discharges into the iteration of compact plasmas that may be used for purposes equivalent to FIB and small plasma thrusters. notwithstanding, those new purposes convey with them a brand new set of demanding situations. With assurance starting from the fundamentals to new and rising functions, Compact Plasma and concentrated Ion Beams discusses how compact high-density microwave plasmas with dimensions smaller than the geometrical cutoff measurement might be generated and applied for delivering targeted ion beams of varied components.

Starting with the basics of the cutoff challenge for wave propagation in waveguides and plasma diagnostics, the writer is going directly to clarify intimately the plasma construction by means of microwaves in a compact geometry and slender tubes. He then completely discusses wave interplay with bounded plasmas and offers a deeper realizing of the physics. The e-book concludes with an updated account of modern examine on pulsed microwaves and the appliance of compact microwave plasmas for multi-element FIB.

It presents a consolidated and unified description of the rising parts in plasma technology and expertise using wave-based plasma assets in line with the author’s personal paintings and event. The publication should be worthwhile not just to validated researchers during this zone yet also will function an outstanding creation to these drawn to utilising those rules to numerous present and new applications.

Show description

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The complex form of Θ indicates that two solutions are possible—one is Θ = cos mθ and the other is Θ = sin mθ. Thus, the modes are degenerate in pairs. The two modes may be interpreted as two states of polarization of the field. 17, substituting x = kcr, the equation becomes a Bessel’s equation in the canonical form. 19) where Jm is the Bessel function of the first kind of order m. The solution Nm, the Bessel function of the second kind, is excluded because of the singularity at r = 0. 21) 25 Review of the Cutoff Problem where m = 0, 1, 2, 3 .

Winter. 1994. 45 GHz ECR ion source, Rev. Sci. Instrum. 65: 775–787. 32. R. Geller. 1990. ECRIS: The electron cyclotron resonance ion sources, Annu. Rev. Nucl. Part. Sci. 40: 15–43. 33. A. Rousseau. L. Tomasini, G. Gousset, C. Boisse-Laporte, and P. Leprince. 1994. Pulsed microwave discharge: A very efficient H atom source, J. Phys. D: Appl. Phys. 27: 2439–2441. T. Mieno and S. Samukawa. 1995. Time variation of plasma properties in a pulse-time-modulated electron cyclotron resonance discharge of chlorine gas, Jpn.

Sci. Instrum. 63: 2550–2552. S. Samukawa, H. Ohtake, and T. Mieno. 1996. Pulse time modulated electron cyclotron resonance plasma discharge for highly selective, highly anisotropic, and charge free etching, J. Vac. Sci. Technol. A 14: 3049–3058. G. H. M. Purcell (editors). 1948. , New York). A. B. Wharton. 1965. , New York, London, Sydney). 2 Review of the Cutoff Problem A Brief History of Earlier Work Since the early days of research in ECR plasmas in 1980s, heating and confinement in electron cyclotron resonance (ECR) plasmas were brought about by electromagnetic coils.

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